Spectroscopic Ellipsometry Principles and Applications
Spectroscopic Ellipsometry Principles and Applications
- ISBN 13:
9780470016084
- ISBN 10:
0470016086
- Edition: 1st
- Format: Hardcover
- Copyright: 03/12/2007
- Publisher: WILEY
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Summary
Spectroscopic ellipsometry has established its position as a high-precision optical-characterization technique - nevertheless, the principles of ellipsometry are often said to be difficult to understand, so the objective of this highly-illustrated book is to provide a fundamental insight into the technique by providing general descriptions for measurement and data analysis methods employed widely in spectroscopic ellipsometry.