9780199861224

Fabrication Engineering at the Micro- and Nanoscale

  • ISBN 13:

    9780199861224

  • ISBN 10:

    0199861226

  • Edition: 4th
  • Format: Paperback
  • Copyright: 11/15/2012
  • Publisher: Oxford University Press

Note: Not guaranteed to come with supplemental materials (access cards, study guides, lab manuals, CDs, etc.)

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Summary

Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, Fabrication Engineering at the Micro- and Nanoscale, Fourth Edition, covers the entire basic unit processes used to fabricate integrated circuits and other devices.

With many worked examples and detailed illustrations, this engaging introduction provides the tools needed to understand the frontiers of fabrication processes.

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