9780132497367

Foundations of MEMS

  • ISBN 13:

    9780132497367

  • ISBN 10:

    0132497360

  • Edition: 2nd
  • Format: Hardcover
  • Copyright: 03/04/2011
  • Publisher: Pearson

Note: Not guaranteed to come with supplemental materials (access cards, study guides, lab manuals, CDs, etc.)

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Summary

For courses in Micro-Electro-Mechanical Systems (MEMS) taken by advanced undergraduate students, beginning graduate students, and professionals. Foundations of MEMSis an entry-level text designed to systematically teach the specifics of MEMS to an interdisciplinary audience. Liu discusses designs, materials, and fabrication issues related to the MEMS field by employing concepts from both the electrical and mechanical engineering domains and by incorporating evolving microfabrication technology - all in a time-efficient and methodical manner. A wealth of examples and problems solidify students' understanding of abstract concepts and provide ample opportunities for practicing critical thinking.

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