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Fundamentals of Microfabrication and Nanotechnology, Third Edition, Three-Volume Set

ISBN: 9780849331800 | 0849331803
Edition: 3rd
Format: Hardcover
Publisher: CRC Press
Pub. Date: 8/1/2011

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Updated and revised, this perennial bestseller continues to provide the most complete MEMS and NEMS reference currently available. Discussing a variety of approaches, it offers background and comprehensive coverage on materials, processes, and manufacturing options. Now in its third edition, Fundamentals of Microfabrication includes recent developments in design packages, DNA and protein array, and fluidics. It also includes a section on nanotechnology applications and a chapter on nanomachining. This seminal reference also serves as a cogent instructional text, providing both classroom and self-learners with worked-out example problems, as well as reinforcing questions with answers.

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