RENT TEXTBOOKS

Today, the availability of bright and highly coherent electron sources and sensitive detectors has radically changed the type and quality of the information which can be obtained by transmission el... MOREectron microscopy (TEM). TEMs are now present in large numbers not only in academia, but also in industrial research centers and fabs.
This book presents in a simple and practical way the new quantitative techniques based on TEM which have recently been invented or developed to address most of the main challenging issues scientists and process engineers have to face to develop or optimize semiconductor layers and devices. Several of these techniques are based on electron holography; others take advantage of the possibility of focusing intense beams within nanoprobes. Strain measurements and mappings, dopant activation and segregation, interfacial reactions at the nanoscale, defect identification and specimen preparation by FIB are among the topics presented in this book. After a brief presentation of the underlying theory, each technique is illustrated through examples from the lab or fab.

Introduction

Chapter 1 Strain mapping using diffraction techniques NBD (Leti XX), CBED

Chapter 2 Strain mapping using GPA/HREM

Chapter 3 Dopant mapping using bright field TEM

Chapter 4 Strain mapping using dark field holography

Chapter 5 Interdiffusion and chemical reaction at interfaces by EELS

Chapter 6 Dopant segregation using STEM-EELS

Chapter 7 Chemical imaging using STEM-HAADF

Chapter 8 Characterization of process induced defects

Chapter 9 Specimen preparation by FIB

Chapter 1... MORE0 Magnetic mapping using bright field holography