Nanotechnology allows us to alter the fundamental properties of matter, giving rise to novel materials with desirable attributes and many new applications. This book focuses on silicon-based nanotechnology, which is compatible with and can easily be integrated into conventional silicon microtechnology. After a brief overview of nanotechnology, the text discusses silicon-based low-dimensional nanodevices followed by the synthesis, characterization, and properties of silicon-based nanomaterials. The authors also explore nanomachining, nanomanipulating, and assembling techniques for nanomaterials along with applications in electronic, photonics, biology, renewable energy, and other areas.