Chemistry in Microelectronics
ISBN: 9781848214361 | 1848214367
Edition: 1stFormat: Hardcover
Publisher: Wiley-ISTE
Pub. Date: 2/25/2013
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This book is about the "Chemistry" involved in the semiconductor industry, chip manufacturing, from Fundamentals to Applications: 5 chapters for this first volume. Other volumes could happen by developing new sectors where chemistry is also involved in this microelectronics world.
Microelectronics is a complex world where many sciences need to collaborate to create nano-objects: we need expertise in electronics, microelectronics, physics, optics and mechanics also crossing into chemistry, electrochemistry, as well ... MORE
Microelectronics is a complex world where many sciences need to collaborate to create nano-objects: we need expertise in electronics, microelectronics, physics, optics and mechanics also crossing into chemistry, electrochemistry, as well ... MORE
Preface ix
Chapter 1. Chemistry in the "Front End of the Line" (FEOL): Deposits, Gate Stacks, Epitaxy and Contacts 1
François MARTIN, Jean-Michel HARTMANN, Véronique CARRON and Yannick LE TIEC
1.1. Introduction 1
1.2. Arrangement of the gate 3
1.3. Chemistry of crystalline materials 19
1.4. Contact areas between the gate and the "source" and "drain" 38
1.5. General conclusion 57
1.6. List of Abbreviations 58
1.7. Bibliography 59
Chapter 2. Chemistry in ... MORE
Vincent JOUSSEAUME, Paul-Henri HAUMESSER, Carole PERNEL, Jeffery BUTTERBAUGH, Sylvain MAÎTREJEAN and Didier LOUIS
2.1. Introduction 81
2.2. Interconnects: generalities and background 83
2.3. Dielectric deposits 99
2.4. Deposition and properties of metal layers for interconnect structures 122
2.5. Cleaning process for copper interconnects 144
2.6. General conclusions and perspectives 161
2.7. List of Abbreviations 164
2.8. Bibliography 165
Chapter 3. The Chemistry of Wet Surface Preparation: Cleaning, Etching and Drying 187
Yannick LE TIEC and Martin KNOTTER
3.1. Introduction 187
3.2. Cleaning 188
3.3. Wet etching 202
3.4. Rinsing and drying 214
3.5. Conclusion 224
3.6. List of Abbreviations 225
3.7. Bibliography 225
Chapter 4. The Use and Management of Chemical Fluids in Microelectronics 233
Christiane GOTTSCHALK, Kevin MCLAUGHLIN, Julie CREN, Catherine PEYNE and Patrick VALENTI
4.1. Ultrapure water 233
4.2. Gases for semiconductors 251
4.3. Dissolved gases 268
4.4. High-purity chemicals 283
4.5. Waste management 290
4.6. List of Abbreviations 301
4.7. Bibliography 303
Chapter 5. Surface Functionalization for Micro- and Nanosystems: Application to Biosensors 309
Antoine HOANG, Gilles MARCHAND, Guillaume NONGLATON, Isabelle TEXIER-NOGUES and Francoise VINET
5.1. Introduction 309
5.2. Materials 310
5.3. Functionalization process 317
5.4. Molecule and macromolecule immobilization 332
5.5. Analytes capture 340
5.6. Conclusion 348
5.7. List of Abbreviations 349
5.8. Bibliography 349
List of Authors 361
Index 363
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