9781848213678

Transmission Electron Microscopy in Micro-nanoelectronics

  • ISBN 13:

    9781848213678

  • ISBN 10:

    1848213670

  • Format: Hardcover
  • Copyright: 12/26/2012
  • Publisher: Iste/Hermes Science Pub

Note: Not guaranteed to come with supplemental materials (access cards, study guides, lab manuals, CDs, etc.)

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Summary

This book presents in a simple and practical way the new quantitative techniques based on transmission electron microscopy which have been recently invented or developed to address most of the main challenging issues scientists and process engineers have to face to develop or optimize semiconductor layers and devices.

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