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This first undergraduate-level textbook on Microsystems and smart systems makes a burgeoning area of professional practice accessible to course teaching. It is based on a course introduced at VTU in India in 2009, which has already been taught to nearly 1000 students. Practical examples and exercises will set this book apart from the professional reference books currently in use as texts on the subject.
Table of Contents
About The Authors
Chapter 1 Introduction
Chapter 2 Micro Sensors, Actuators, Systems And Smart Materials: An Overview
Chapter 3 Micromachining Technologies
Chapter 4 Mechanics Of Slender Solids In Microsystems
Chapter 5 Finite Element Method
Chapter 6 Modeling Of Coupled Electromechanical Systems
Chapter 7 Electronics Circuits And Control For Micro And Smart Systems
Chapter 8 Integration Of Micro And Smart Systems
Chapter 9 Scaling Effects In Microsystems
Chapter 10 Simulation Of Microsystems Using Fea Software