Lithography
Lithography
- ISBN 13:
9781118557662
- ISBN 10:
1118557662
- Edition: 1st
- Format: eBook
- Copyright: 01/15/2013
- Publisher: Wiley-ISTE
Rent
Sorry, this item is currently unavailable.
Note: Supplemental materials are not guaranteed with Rental or Used book purchases.
Extend or Purchase Your Rental at Any Time
Need to keep your rental past your due date? At any time before your due date you can extend or purchase your rental through your account.
Summary
Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc.
This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components.