9781118557662

Lithography

  • ISBN 13:

    9781118557662

  • ISBN 10:

    1118557662

  • Edition: 1st
  • Format: eBook
  • Copyright: 01/15/2013
  • Publisher: Wiley-ISTE

Note: Not guaranteed to come with supplemental materials (access cards, study guides, lab manuals, CDs, etc.)

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Summary

Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc.

This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components.

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