9780201444940

Introduction to Microelectronic Fabrication Volume 5 of Modular Series on Solid State Devices

  • ISBN 13:

    9780201444940

  • ISBN 10:

    0201444941

  • Edition: 2nd
  • Format: Paperback
  • Copyright: 10/17/2001
  • Publisher: Pearson

Note: Not guaranteed to come with supplemental materials (access cards, study guides, lab manuals, CDs, etc.)

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Summary

This introductory book assumes minimal knowledge of the existence of integrated circuits and of the terminal behavior of electronic components such as resistors, diodes, and MOS and bipolar transistors. It presents to readers the basic information necessary for more advanced processing and design books.Focuses mainly on the basic processes used in fabrication, including lithography, oxidation, diffusion, ion implementation, and thin film deposition. Covers interconnection technology, packaging, and yield.Appropriate for readers interested in the area of fabrication of solid state devices and integrated circuits.

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