9780849331800

Fundamentals of Microfabrication and Nanotechnology, Third Edition, Three-Volume Set

  • ISBN 13:

    9780849331800

  • ISBN 10:

    0849331803

  • Edition: 3rd
  • Format: Hardcover
  • Copyright: 08/01/2011
  • Publisher: CRC Press

Note: Not guaranteed to come with supplemental materials (access cards, study guides, lab manuals, CDs, etc.)

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Summary

Updated and revised, this perennial bestseller continues to provide the most complete MEMS and NEMS reference currently available. Discussing a variety of approaches, it offers background and comprehensive coverage on materials, processes, and manufacturing options. Now in its third edition, Fundamentals of Microfabrication includes recent developments in design packages, DNA and protein array, and fluidics. It also includes a section on nanotechnology applications and a chapter on nanomachining. This seminal reference also serves as a cogent instructional text, providing both classroom and self-learners with worked-out example problems, as well as reinforcing questions with answers.

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