Sputtering Materials for VLSI and Thin Film Devices
ISBN: 9780815515937 | 0815515936
Format: HardcoverPublisher: Elsevier Science Ltd
Pub. Date: 9/23/2013
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An important resource for the microelectronics and flat panel display industries, this book focuses on the development of sputtering targets for conductor, diffusion barrier, reflective, data storage and display applications.Sarkar reviews essential microelectronics industry topics, including: history and technology trends; chip making fundamentals; deposition and properties of thin films; and the role of sputtering target performance on overall production yield. Materials science fundamentals, types of metallic materials for conductors, diffusion barrier, data storage, and flat panel display applications are also discussed.The author illustrates his arguments with case studies and real-world examples of troubleshooting in an industrial setting.* Provides practical case studies and troubleshooting examples* Unique coverage of the design of sputtering targets and processing of sputtering materials for thin film applications* Essential design information for engineers working in the field of flat panel displays
| Sputtering materials for microelectronic industry | |
| Sputter deposition of thin films | |
| Performance of sputtering targets and productivity | |
| Sputtering target manufacturing | |
| Sputtering targets for integrated circuits | |
| Sputtering targets for displays and photovoltaic devices | |
| Ferromagnetic sputtering targets for silicide and data storage applications | |
| Troubleshoo... MORE | |
| Diffusion and phase transformation | |
| Crystallographic texture | |
| Phase change materials | |
| Mechanical property evaluation | |
| Units and conversion factors | |
| Periodic table | |
| Table of Contents provided by Publisher. All Rights Reserved. |
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