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Sputtering Materials for VLSI and Thin Film Devices

ISBN: 9780815515937 | 0815515936
Format: Hardcover
Publisher: Elsevier Science Ltd
Pub. Date: 10/25/2013

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An important resource for the microelectronics and flat panel display industries, this book focuses on the development of sputtering targets for conductor, diffusion barrier, reflective, data storage and display applications.Sarkar reviews essential microelectronics industry topics, including: history and technology trends; chip making fundamentals; deposition and properties of thin films; and the role of sputtering target performance on overall production yield. Materials science fundamentals, types of metallic materials for conductors, diffusion barrier, data storage, and flat panel display applications are also discussed.The author illustrates his arguments with case studies and real-world examples of troubleshooting in an industrial setting.* Provides practical case studies and troubleshooting examples* Unique coverage of the design of sputtering targets and processing of sputtering materials for thin film applications* Essential design information for engineers working in the field of flat panel displays


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