This text provides students as well as practitioners (engineers, technicians, physical and biological scientists, clinicians, and technical managers) with a comprehensive introduction to the field of scanning electron microscopy (SEM) and X-ray microanalysis. The authors emphasize the practical aspects of the techniques described. Topics discussed include user-controlled functions of scanning electron microscopes and x-ray spectrometers, the characteristics of electron beam - specimen interactions, image formation and interpretation, the use of x-rays for qualitative and quantitative analysis and the methodology for structural analysis using electron back-scatter diffraction. SEM sample preparation methods for hard materials, polymers, and biological specimens are covered in separate chapters. In addition techniques for the elimination of charging in non-conducting specimens are detailed. A data base of useful parameters for SEM and X-ray micro-analysis calculations and enhancements to the text chapters are available on an accompanying CD.This is the third edition of this highly acclaimed text and has been extensively revised. The text has been used in educating over 3,000 students at the Lehigh SEM short course as well as thousands of undergraduate and graduate students at universities in every corner of the globe. The authors have made extensive changes to the text and figures in this edition as a result of their experience in teaching the various concepts of SEM and x-ray microanalysis.