Robotics for Electronics Manufacturing : Principles and Applications in Cleanroom Automation
ISBN: 9780521876520 | 0521876524
Edition: 1stFormat: Hardcover
Publisher: Cambridge University Press
Pub. Date: 6/7/2010
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Understand the design, testing, and application of cleanroom robotics with this practical guide. Together with numerous real-world examples, you'll also get hands-on tips for avoiding design pitfalls and reducing design time/cost. Compliance with industry standards is emphasized, and discussions of recommended materials for atmospheric and vacuum robots are included.
| Preface | p. xi |
| Industrial robotics | p. 1 |
| History of industrial robotics | p. 1 |
| The global robotics industry | p. 2 |
| Applications and operational stock by region | p. 5 |
| Socioeconomic impact | p. 6 |
| Definitions, standards, and terminology | p. 7 |
| Applicable and related standards | p. 11 |
| Cleanroom robotics | p. 12 |
| Manufacturing in... MORE | p. 12 |
| Semiconductor manufacturing | p. 14 |
| Flat panel display manufacturing | p. 20 |
| Substrate-handling, robots | p. 23 |
| Applicable and related standards | p. 28 |
| Design of atmospheric robots | p. 30 |
| Clean materials | p. 30 |
| Prevention of electrostatic charge | p. 37 |
| Surface finishes for cleanroom robotics | p. 43 |
| Clean drive trains | p. 48 |
| Arm compliance | p. 53 |
| End-effectors | p. 60 |
| Robot assembly and handling | p. 62 |
| Applicable and related standards | p. 70 |
| Design of vacuum robots | p. 73 |
| Robotics challenges in vacuum environments | p. 73 |
| What is vacuum? | p. 74 |
| Static vacuum barrier | p. 76 |
| Dynamic vacuum barrier | p. 79 |
| Clean drive trains | p. 92 |
| External and internal leaks | p. 99 |
| Materials and surface finishes | p. 104 |
| Assembly and installation of vacuum robots | p. 115 |
| Applicable and related standards | p. 120 |
| Kinematics | p. 124 |
| Joint space, operational space, and workspace | p. 124 |
| Kinematic robot structures | p. 126 |
| Mathematical foundations | p. 129 |
| Forward kinematics | p. 134 |
| Inverse kinematics | p. 149 |
| Commercial substrate-handling robots | p. 150 |
| Applicable and related standards | p. 153 |
| Dynamics and control | p. 154 |
| Manipulator dynamics | p. 154 |
| Robot motion control | p. 162 |
| Networked, decentralized robot control | p. 172 |
| Applicable and related standards | p. 177 |
| Test and characterization | p. 179 |
| Airborne particle contamination | p. 179 |
| Surface particle contamination | p. 182 |
| Positioning accuracy and repeatability | p. 186 |
| Path accuracy and repeatability | p. 199 |
| Vibration analysis | p. 206 |
| Mechanical axis decoupling | p. 212 |
| Applicable and related standards | p. 218 |
| SI units and conversion tables | p. 220 |
| Standards organizations | p. 223 |
| Standard temperature and pressure (STP) | p. 225 |
| References | p. 226 |
| Index | p. 232 |
| Table of Contents provided by Ingram. All Rights Reserved. |
Dr. Karl Mathia studied in Germany and the United States and holds advanced degrees in Electrical and Computer Engineering. He has over 20 years of experience in research and development, product development engineering, and has also held management positions at leading robotic firms, including Brooks Automation and Newport Corporation.
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