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Nanoparticle Engineering for Chemical-Mechanical Planarization : Fabrication of Next-Generation...

by: ;
ISBN: 9781420059113 | 1420059114
Edition: 1st
Format: Hardcover
Publisher: CRC Press
Pub. Date: 2/20/2009

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In the development of next-generation nanoscale devices, higher speed and lower power operation is the name of the game. Increasing reliance on mobile computers, mobile phones, and other electronic devices demands a greater degree of speed and power. As chemical mechanical planarization (CMP) progressively becomes perceived less as black art and more as a cutting-edge technology, it is emerging as the technology for achieving higher performance devices.


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