This book gives a comprehensive cross-section of promising MEMS and nanotechnologies that are important to the future growth of the electronics industry. International experts in academia and leading industrial institutions present the most recent scientific developments. They highlight new technologies that have successfully transitioned from the laboratory to marketplace as well as technologies that have near-term market applications in electronics, materials, and optics. The book also provides up-to-date references on the latest advances in this evolving field.