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Materials, Processes, and Reliability for Advanced Interconnects for Micro- and Nanoelectronics...

ISBN: 9781605113128 | 1605113123
Edition: 1st
Format: Hardcover
Publisher: Cambridge Univ Pr
Pub. Date: 11/21/2011

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This volume includes selected papers based on the presentations given at Symposium O, "Materials, Processes, and Reliability for Advanced Interconnects for Micro- and Nanoelectronics," held at the April 2529, 2011 MRS Spring Meeting in San Francisco, California. The symposium included topics relating to low-k dielectrics, integration, reliability, metallization, packaging and emerging technologies.


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