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Lithography

by:
9781848212022

Lithography

by:
  • ISBN 13:

    9781848212022

  • ISBN 10:

    184821202X

  • Edition: 1st
  • Format: Hardcover
  • Copyright: 12/20/2010
  • Publisher: Wiley-ISTE
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Summary

Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc. This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components.

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