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Lithography

ISBN: 9781118557662 | 1118557662
Edition: 1st
Format: eBook
Publisher: Wiley-ISTE
Pub. Date: 1/15/2013

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Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of optics, chemistry, mechanics, micro and nano-fluids, etc.

This book deals with essential technologies and processes, primarily used in industrial manufacturing of microprocessors and other electronic components.



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