An Introduction to SIMS for Surface and Thin Film Analysis provides a basic introduction to SIMS, covering both the science behind the subject, and the instrumentation and techniques available. Following a scene-setting introduction, the book explores sputtering and ion formation; instrumentation, analytical applications, techniques, and data processing; and a summation of the pros and cons of SIMS in relation to other analytical methods. A perfect companion to Surface Analysis by XPS and AES, the two together provide complete coverage of surface and thin film analysis by SSIMS, DSIMS, XPS, and AES.