An Introduction to Sims for Surface and Thin Film Analysis
An Introduction to Sims for Surface and Thin Film Analysis
- ISBN 13:
9780470091326
- ISBN 10:
0470091320
- Format: Hardcover
- Copyright: 03/01/2011
- Publisher: Wiley
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Summary
An Introduction to SIMS for Surface and Thin Film Analysis provides a basic introduction to SIMS, covering both the science behind the subject, and the instrumentation and techniques available. Following a scene-setting introduction, the book explores sputtering and ion formation; instrumentation, analytical applications, techniques, and data processing; and a summation of the pros and cons of SIMS in relation to other analytical methods. A perfect companion to Surface Analysis by XPS and AES, the two together provide complete coverage of surface and thin film analysis by SSIMS, DSIMS, XPS, and AES.