Handbook of 3D Integration, Volume 3 3D Process Technology
Handbook of 3D Integration, Volume 3 3D Process Technology
- ISBN 13:
9783527334667
- ISBN 10:
3527334661
- Edition: 1st
- Format: Hardcover
- Copyright: 07/21/2014
- Publisher: Wiley-VCH
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Summary
Invaluable reading for materials scientists, semiconductor physicists, and those working in the semiconductor industry, as well as IT and electrical engineers.