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Fundamentals of Semiconductor Fabrication
Fundamentals of Semiconductor Fabrication
- ISBN 13:
9780471232797
- ISBN 10:
0471232793
- Edition: 1st
- Format: Paperback
- Copyright: 04/11/2003
- Publisher: Wiley
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Summary
Offers a basic, up-to-date introduction to semiconductor fabrication technology, including both the theoretical and practical aspects of all major steps in the fabrication sequence Presents comprehensive coverage of process sequences Introduces readers to modern simulation tools Addresses the practical aspects of integrated circuit fabrication Clearly explains basic processing theory
