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Foundations of MEMS
ISBN: 9780131472860 | 0131472860
Edition: 1stFormat: Paperback
Publisher: Prentice Hall
Pub. Date: 1/1/2006
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For courses in Micro-Electro-Mechanical Systems (MEMS) taken by advanced undergraduate students, beginning graduate students, and professionals. Foundations of MEMS is the first entry-level text of its kind for systematically teaching the specifics of MEMS to an interdisciplinary audience. Liu discusses designs, materials, and fabrication issues related to the MEMS field by employing concepts from both the electrical and mechanical engineering domains and by incorporating evolving microfabrication technology all in a time-efficient and methodical manner. A wealth of examples and problems solidify students' understanding of abstract concepts and provide ample opportunities for practicing critical thinking.
| Introduction | |
| Preview | |
| The History of MEMS Development | |
| The Intrinsic Characteristics of MEMS | |
| Devices: Sensors and Actuators | |
| Introduction to Microfabrication | |
| Preview | |
| Overview of Microfabrication | |
| The Microelectronics Fabrication Process | |
| Silicon-based MEMS Process | |
| New Materials a... MORE | |
| Points of Consideration for Processing | |
| Review of Essential Electrical and Mechanical Concepts | |
| Preview | |
| Conductivity of Semiconductors | |
| Crystal Planes and Orientations | |
| Stress and Strain | |
| Flexural Beam Bending Analysis Under Simple Loading Conditions | |
| Torsional Deflections | |
| Intrinsic Stress | |
| Resonant Frequency and Quality Factor | |
| Active Tuning of Spring Constant and Resonant Frequency | |
| A List of Suggested Courses and Books | |
| Electrostatic Sensing and Actuation | |
| Preview | |
| Introduction to Electrostatic Sensors and Actuators | |
| Parallel-Plate Capacitors | |
| Applications of Parallel-Plate Capacitors | |
| Interdigitated Finger Capacitors | |
| Applications of Comb-Drive Devices | |
| Thermal Sensing and Actuation | |
| Preview | |
| Introduction | |
| Sensors and Actuators Based on Thermal Expansion | |
| Thermal Couplesnbsp | |
| Thermal Resistors | |
| Applications | |
| Piezoresistive Sensors | |
| Preview | |
| Origin and Expression of Piezoresistivity | |
| Piezoresistive Sensor Materials | |
| Stress Analysis of Mechanical Elements | |
| Applications of Piezoresistive Sensors | |
| Piezoelectric Sensing and Actuation | |
| Preview | |
| Introduction | |
| Properties of Piezoelectric Materials | |
| Applications | |
| Magnetic Actuation | |
| Preview | |
| Essential Concepts and Principles | |
| Fabrication of Micromagnetic Components | |
| Case Studies of MEMS Magnetic Actuators | |
| Summary of Sensing and Actuation | |
| Preview | |
| Comparison of Major Sensing and Actuation Methods | |
| Tunneling Sensing | |
| Optical Sensing | |
| Field Effect Transistors | |
| Radio Frequency Resonance Sensing | |
| Bulk Micromachining and Silicon Anisotropic Etching | |
| Preview | |
| Introduction | |
| Anisotropic Wet Etching | |
| Dry Etching of Silicon - Plasma Etching | |
| Deep Reactive Ion Etching (DRIE) | |
| Isotropic Wet Etching | |
| Gas-Phase Etchants | |
| Native Oxide | |
| Wafer bonding | |
| Case Studies | |
| Surface Micromachining | |
| Preview | |
| Basic Surface Micromachining Processes | |
| Structural and Sacrificial Materials | |
| Acceleration of Sacrificial Etch | |
| Stiction and AntiStiction Methods | |
| Assembly of 3D MEMS | |
| Foundry Process | |
| Polymer MEMS | |
| Previ | |
| Table of Contents provided by Publisher. All Rights Reserved. |
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