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Fabrication Engineering at the Micro- And Nanoscale
ISBN: 9780195320176 | 0195320174
Edition: 3rdFormat: Paperback
Publisher: Oxford University Press, USA
Pub. Date: 9/17/2007
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Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, the third edition of Fabrication Engineering at the Micro and Nanoscale provides a thorough and accessible introduction to all fields of micro and nano fabrication. Completely revised and updated, the text covers the entire basic unit processes used to fabricate integrated circuits and other devices. It includes more worked examples, illustrations, and expands coverage of the frontiers of fabrication processes. The physics and che... MORE
| An Introduction to Microelectronic Fabrication | |
| Semiconductor Substrates | |
| Diffusion | |
| Thermal Oxidation | |
| Ion Implantation | |
| Rapid Thermal Processing | |
| Optical Lithography | |
| Photoresists | |
| Nonoptical Lithographic Techniques | |
| Vacuum Science and Plasmas | |
| Etching | |
| Phys... MORE | |
| Chemical Vapor Deposition | |
| Epitaxial Growth | |
| Device Isolation, Contacts, and Metallization | |
| CMOS Technologies | |
| Other Transistor Technologies | |
| Optoelectronic Technologies | |
| Mems | |
| Integrated Circuit Manufacturing | |
| Appendixes | |
| Acronyms and Common Symbols | |
| Properties of Selected Semiconductor Materials | |
| Physical Constants | |
| Conversion Factors | |
| Some properties of the Error Function | |
| F Values | |
| Index | |
| Table of Contents provided by Publisher. All Rights Reserved. |
Stephen A. Campbell is Professor of Electrical and Computer Engineering at the University of Minnesota, Distinguished Professor of the Institute of Technology, Director of the Nanofabrication Center, and Director of the Center for Nanostructure Applications. He has extensive experience in both academia and industry in microelectronic processing. His current research interests include the application of semiconductor nanoparticles for high performance electronic and optoelectronic devices, advanced materials, novel sensors and transistor structures, and various applications of MEMS.
