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List of Contributors xvii
List of Abbreviations xxv
Section I Low-k Materials 1
1 Low-k Materials: Recent Advances 3
Geraud Dubois and Willi Volksen
1.1 Introduction 3
1.2 Integration Challenges 5
1.2.1 Process-Induced Damage 6
1.2.2 Mechanical Properties 9
1.3 Processing Approaches to Existing Integration Issues 10
1.3.1 Post-deposition Treatments 11
1.3.2 Prevention or Repair of Plasma-Induced ... MORE